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(해외학술지)'Journal of Micro/Nanolithography, MEMS, and MOEMS'
at RISS Linked Data
https://data.riss.kr/resource/ForeignJournal/2001053903
property info
Property
Value
skos:prefLabel
Journal of Micro/Nanolithography, MEMS, and MOEMS
rdf:type
http://data.riss.kr/ontology/ForeignJournal
dc:title
Journal of Micro/Nanolithography
dbpprop:country
us
dc:subject
537.5
dcterms:DDC
537.5
dc:relation
Formerly (until 2007): Journal of Microlithography
bibo:locator
http://www.riss.kr/link?id=S20010539
keris:sourceTitle
SCIE;SCOPUS
keris:interval
q
keris:sourceCitation
SCIE;SCOPUS
dc:publisher
SPIE - International Society for Optical Engineering
keris:hasArticle
A Change of the Guard
Special Section Guest Editorial: Dimensional Metrology with Atomic Force Microscopy
Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope
Metrological scanning probe microscope based on a quartz tuning fork detector
New developments at Physikalisch Technische Bundesanstalt in three-dimensional atomic force microscopy with tapping and torsion atomic force microscopy mode and vector approach probing strategy
Evaluation of a vertical piezoelectric transducer stage using a large range metrological atomic force microscope
Traceable calibration of a critical dimension atomic force microscope
Particle number density gradient samples for nanoparticle metrology with atomic force microscopy
Traceable pitch metrology: supporting the development of patterned media and more
Atomic force microscope method for sidewall measurement through carbon nanotube probe deformation correction
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