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(해외학술논문)'Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope'at RISS Linked Data

https://data.riss.kr/resource/ForeignArticle/58839530

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Property	Value
skos:prefLabel	Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope
rdf:type	http://data.riss.kr/ontology/ForeignArticle
dc:title	Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope
dbpprop:country	us
dcterms:DDC	621.3815
bibo:locator	http://www.riss.kr/link?id=O58839530
keris:page	11002
keris:interval	q
dc:creator	Korpelainen, V. Seppa, J. Lassila, A.
dc:publisher	International Society for Optical Engineering (SPIE)
keris:hasJournalOf	Journal of Micro/Nanolithography, MEMS, and MOEMS

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